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Raith Application Notes
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Raith Application Notes
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Raith GmbH
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Costea, Sorin
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Jäckel, Heinz
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Levermann, Mark
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Piaszenski, Guido
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Rampe, Andreas
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Accurate proximity-effect correction of nanoscale structures with NanoPECS
Item type:
Other Publication
Robin, Franck
;
Costea, Sorin
;
Stark, Glen
; et al.
(
2006
)
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Raith Application Notes
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