Micromachines

Journal: Micromachines

Abbreviation

Micromachines

Publisher

MDPI

ISSN

2072-666X

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Publications 1 - 10 of 22

Reduced Etch Lag and High Aspect Ratios by Deep Reactive Ion Etching (DRIE)
Gerlt, Michael S.; Läubli, Nino; Manser, Michel; et al. (2021)
Micromachines
Deep reactive ion etching (DRIE) with the Bosch process is one of the key procedures used to manufacture micron-sized structures for MEMS and microfluidic applications in silicon and, hence, of increasing importance for miniaturisation in biomedical research. While guaranteeing high aspect ratio structures and providing high design flexibility, the etching procedure suffers from reactive ion etching lag and often relies on complex oxide masks to enable deep etching. The reactive ion etching lag, leading to reduced etch depths for features exceeding an aspect ratio of 1:1, typically causes a height difference of above 10% for structures with aspect ratios ranging from 2.5:1 to 10:1, and, therefore, can significantly influence subsequent device functionality. In this work, we introduce an optimised two-step Bosch process that reduces the etch lag to below 1.5%. Furthermore, we demonstrate an improved three-step Bosch process, allowing the fabrication of structures with 6 µm width at depths up to 180 µm while maintaining their stability.
Simple fabrication of structured magnetic metallic nano-platelets for bio-analytical applications
Novotny, Jakub; Jusková, Petra; Kupcik, Rudolf; et al. (2019)
Micromachines
This short communication presents a simple method of preparation of thin-metal nano-platelets utilizing metal sputtering and lift-off photolithography. The method offers complete control over size, shape and properties of nano-platelets of sub-micrometer thickness. Platelets with a thickness of 50–200 nm and with defined arbitrary shapes and sizes in the range of 15–300 μm were prepared from single or multiple metal layers by magnetron sputtering. Deposition of different metals in layers enabled fabrication of bi- or tri-metallic platelets with a magnetic core and differently composed surfaces. Highly reflective nano-platelets with a magnetic core allowed manipulation by magnetic fields, while different metallic surfaces served for functionalization by selected molecules. Submicron thin nano-platelets are extremely light (e.g., ~20 ng for a 100 μm × 100 μm × 0.1 μm gold nano-platelet) so that they can be attached to surfaces by only a few chemical bonds. At the same time their area is sufficiently large for simple optical recognition of their shape which is intended to label various characteristics depending on the specific surface functionalization of the given shape.
Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching
Shi, Zhitian; Jefimovs, Konstantins; Romano, Lucia; et al. (2020)
Micromachines
The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few micrometers has greatly limited imaging applications based on X-ray grating interferometry. A high etching rate with low aspect ratio dependence is crucial for higher X-ray energy applications and good profile control by deep reactive ion etching of grating patterns. To achieve this goal, a modified Coburn–Winters model was applied in order to study the influence of key etching parameters, such as chamber pressure and etching power. The recipe for deep reactive ion etching was carefully fine-tuned based on the experimental results. Silicon gratings with an area of 70 × 70 mm2, pitch size of 1.2 and 2 μm were fabricated using the optimized process with aspect ratio α of ~67 and 77, respectively.
Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions
Jacot-Descombes, Loïc; Gullo, Maurizio R.; Cadarso, Victor J.; et al. (2014)
Micromachines
Structuring SU-8 based superparamagnetic polymer composite (SPMPC) containing Fe3O4 nanoparticles by photolithography is limited in thickness due to light absorption by the nanoparticles. Hence, obtaining thicker structures requires alternative processing techniques. This paper presents a method based on inkjet printing and thermal curing for the fabrication of much thicker hemispherical microstructures of SPMPC. The microstructures are fabricated by inkjet printing the nanoparticle-doped SU-8 onto flat substrates functionalized to reduce the surface energy and thus the wetting. The thickness and the aspect ratio of the printed structures are further increased by printing the composite onto substrates with confinement pedestals. Fully crosslinked microstructures with a thickness up to 88.8 μm and edge angle of 112° ± 4° are obtained. Manipulation of the microstructures by an external field is enabled by creating lines of densely aggregated nanoparticles inside the composite. To this end, the printed microstructures are placed within an external magnetic field directly before crosslinking inducing the aggregation of dense Fe3O4 nanoparticle lines with in-plane and out-of-plane directions.
Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
Romano, Lucia; Jefimovs, Konstantins (2023)
Micromachines
Microfluidic-based droplet and cell manipulations using artificial bacterial flagella
Ding, Yun; Qiu, Famin; Casadevall i Solvas, Xavier; et al. (2016)
Micromachines
Herein, we assess the functionality of magnetic helical microswimmers as basic tools for the manipulation of soft materials, including microdroplets and single cells. Their ability to perform a range of unit operations is evaluated and the operational challenges associated with their use are established. In addition, we also report on interactions observed between the head of such helical swimmers and the boundaries of droplets and cells and discuss the possibilities of assembling an artificial swimming microorganism or a motorized cell.
Microfluidic generation of amino-functionalized hydrogel microbeads capable of on-bead bioassay
Kim, Seongsoo; Lee, Sang-Myung; Lee, Sung Sik; et al. (2019)
Micromachines
Microfluidic generation of hydrogel microbeads is a highly efficient and reproducible approach to create various functional hydrogel beads. Here, we report a method to prepare crosslinked amino-functionalized polyethylene glycol (PEG) microbeads using a microfluidic channel. The microbeads generated from a microfluidic device were evaluated by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and confocal laser scanning microscopy, respectively. We found that the microbeads were monodisperse and the amino groups were localized on the shell region of the microbeads. A swelling test exhibited compatibility with various solvents. A cell binding assay was successfully performed with RGD peptide-coupled amino-functionalized hydrogel microbeads. This strategy will enable the large production of the various functional microbeads, which can be used for solid phase peptide synthesis and on-bead bioassays.
A Bubble-Free Microfluidic Device for Easy-to-Operate Immobilization, Culturing and Monitoring of Zebrafish Embryos
Zhu, Zhen; Geng, Yangye; Yuan, Zhangyi; et al. (2019)
Micromachines
The development of miniaturized devices for studying zebrafish embryos has been limited due to complicated fabrication and operation processes. Here, we reported on a microfluidic device that enabled the capture and culture of zebrafish embryos and real-time monitoring of dynamic embryonic development. The device was simply fabricated by bonding two layers of polydimethylsiloxane (PDMS) structures replicated from three-dimensional (3D) printed reusable molds onto a flat glass substrate. Embryos were easily loaded into the device with a pipette, docked in traps by gravity, and then retained in traps with hydrodynamic forces for long-term culturing. A degassing chamber bonded on top was used to remove air bubbles from the embryo-culturing channel and traps so that any embryo movement caused by air bubbles was eliminated during live imaging. Computational fluid dynamics simulations suggested this embryo-trapping and -retention regime to exert low shear stress on the immobilized embryos. Monitoring of the zebrafish embryogenesis over 20 h during the early stages successfully verified the performance of the microfluidic device for culturing the immobilized zebrafish embryos. Therefore, this rapid-prototyping, low-cost and easy-to-operate microfluidic device offers a promising platform for the long-term culturing of immobilized zebrafish embryos under continuous medium perfusion and the high-quality screening of the developmental dynamics.
Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
Romano, Lucia (2020)
Micromachines
Hydrophilic surface modification of PDMS microchannel for O/W and W/O/W emulsions
Bashir, Shazia; Bashir, Muhammad; Solvas, Xavier Casadevall I.; et al. (2015)
Micromachines
A surface modification method for bonded polydimethylsiloxane (PDMS) microchannels is presented herein. Polymerization of acrylic acid was performed on the surface of a microchannel using an inline atmospheric pressure dielectric barrier microplasma technique. The surface treatment changes the wettability of the microchannel from hydrophobic to hydrophilic. This is a challenging task due to the fast hydrophobic recovery of the PDMS surface after modification. This modification allows the formation of highly monodisperse oil-in-water (O/W) droplets. The generation of water-in-oil-in-water (W/O/W) double emulsions was successfully achieved by connecting in series a hydrophobic microchip with a modified hydrophilic microchip. An original channel blocking technique to pattern the surface wettability of a specific section of a microchip using a viscous liquid comprising a mixture of honey and glycerol, is also presented for generating W/O/W emulsions on a single chip.

Publications 1 - 10 of 22

Journal: Micromachines

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