Sensors and Actuators A: Physical

Journal: Sensors and Actuators A: Physical

Abbreviation

Sens. actuators, A, Phys.

Publisher

Elsevier

ISSN

0924-4247
1873-3069

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Publications 1 - 10 of 57

Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment
Schmid, S.; Senn, P.; Hierold, C. (2008)
Sensors and Actuators A: Physical
Integration of silver nanowires into SU-8 hollow cantilevers for piezoresistive-based sensing
Han, Hana; Martinez, Vincent; Forró, Csaba; et al. (2020)
Sensors and Actuators A: Physical
An in-plane cobalt-nickel microresonator sensor with magnetic actuation and readout
Ergeneman, O.; Eberle, P.; Suter, M.; et al. (2012)
Sensors and Actuators A: Physical
Three-dimensional nanosprings for electromechanical sensors
Bell, Dominik J.; Sun, Y.; Zhang, Li; et al. (2006)
Sensors and Actuators A: Physical
Nano electromechanical sensors based on carbon nanotubes
Hierold, Christofer; Jungen, Alain; Stampfer, Christoph; et al. (2007)
Sensors and Actuators A: Physical
Fabrication of hard magnetic microarrays by electroless codeposition for MEMS actuators
Guan, Shan; Nelson, Bradley J. (2005)
Sensors and Actuators A: Physical
Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function
Bachmann, Daniel; Kühne, Stéphane; Hierold, Christofer (2006)
Sensors and Actuators A: Physical
A novel test method to determine the adhesion energy of various MEMS surfaces in contact is presented. The method is based on an energy equilibrium state consideration between mechanical deformation energy and adhesion energy. The adhesion energy of the measurement structures is determined by means of pull-off tests and the results are modelled using a Weibull-type distribution function for stiction. In contrast to previous test methods, based on the same physical principle, our new method not only allows to characterize various materials but also various surface geometries. For a contact pair of a circular silicon disc of 200 mm in diameter and of a silicon substrate both covered with native oxide we measured under atmospheric conditions the average adhesion energy as to be 0.13 mJ/m2. The low value of adhesion energy is due to the curvature of one contact face.
Scaling of planar dielectric elastomer actuators in an agonist-antagonist configuration
Jordi, C.; Michel, S.; Kovacs, G.; et al. (2010)
Sensors and Actuators A: Physical
Design and characterization of a novel, robust, tri-axial force sensor
Baki, Peter; Székely, Gábor; Kósa, Gábor (2013)
Sensors and Actuators A: Physical
Thick-film multi-DOF force/torque sensor for wrist rehabilitation
Ryser, Peter; Jacq, Caroline; Lüthi, Barthélémy; et al. (2010)
Sensors and Actuators A: Physical
A complete six degree of freedom (6 DOF) force/torque sensor has been designed and fabricated, adapted to wrist rehabilitation applications, with the focus laid on simple, straightforward manufacturing processes. This paper details the mechanical design, 3D modeling, manufacture and characterisation of the sensor. Compared to previous work [1] , this design has the advantage of simple, fully planar machining, and the load-sensing elements all lie on the same plane, making the device compatible with single-film deposition or a foil bonding process. The sensor was machined from steel, and the piezoresistive load-sensing bridges were deposited using thick-film technology. We used commercial thick-film materials in the work described here. A new lead-free materials system compatible with low processing temperatures (<700 °C) will shortly replace the commercial one and is expected to eventually also be adaptable to aluminium substrates. Such a sensor could find applications in multi-DOF therapeutic robotic systems as well as in isometric motor training.

Publications 1 - 10 of 57

Journal: Sensors and Actuators A: Physical

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