Journal: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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Abbreviation
J. Vac. Sci. Technol. B
Publisher
American Institute of Physics
14 results
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Publications 1 - 10 of 14
- Effect of reverse flow by differential pressure on the protection of critical surfaces against particle contaminationItem type: Journal Article
- Full scale simulation of a field-emitter arrays based electron source for free-electron lasersItem type: Journal Article
- Bit-array patterns with density over 1 Tbit/in.2 fabricated by extreme ultraviolet interference lithographyItem type: Journal Article
- Fabrication of Fresnel zone plates by holography in the extreme ultraviolet regionItem type: Conference Paper
- In situ characterization of block copolymer ordering on chemically nanopatterned surfaces by time-resolved small angle x-ray scatteringItem type: Conference Paper
- Assessing the performance of two-dimensional dopant profiling techniquesItem type: Conference Paper
- Detailed analysis of the influence of an inductively coupled plasma reactive-ion etching process on the hole depth and shape of photonic crystals in InP/InGaAsPItem type: Journal Article
- Accuracy of scanning capacitance microscopy for the delineation of electrical junctionsItem type: Journal Article
- Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystalsItem type: Journal Article
- Fabrication of elastomer pillar arrays with modulated stiffness for cellular force measurementsItem type: Other Conference Item
Publications 1 - 10 of 14