Journal: Microelectronic Engineering
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Abbreviation
Microelectron. eng.
Publisher
Elsevier
59 results
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Publications1 - 10 of 59
- Capillary assembly of cross-gradient particle arrays using a microfluidic chipItem type: Journal Article
- Beyond 100 nm resolution in 3D laser lithography — Post processing solutionsItem type: Journal Article
- Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lensesItem type: Journal Article
- Measurement of demolding forces in full wafer thermal nanoimprintItem type: Conference Paper
- Selective deposition of functionalized nano-objects by nanoxerographyItem type: Conference Paper
- Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in waterItem type: Other Conference Item
- Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridiumItem type: Journal Article
- Focused ion beam modifications of indium phosphide photonic crystalsItem type: Conference Paper
- High aspect ratio metal microcasting by hot embossing for X-ray optics fabricationItem type: Journal Article
- Flame aerosol deposition of TiO2 nanoparticle films on polymers and polymeric microfluidic devices for on-chip phosphopeptide enrichmentItem type: Journal Article
Publications1 - 10 of 59