32-Channel Integrated Electrical Impedance Sensors on a Multi-Functional Neural Microelectrode Array Platform
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Author / Producer
Date
2016
Publication Type
Conference Paper
ETH Bibliography
yes
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Abstract
An integrated measurement platform was implemented to make in-vitro impedance measurements of neuronal cells on a multi-functional CMOS microelectrode array (MEA). This high-density array is made of 59’760 platinum microelectrodes with a pitch of 13.5μm. Impedance sensing can be performed through 32 electrodes in parallel, while the electrode sites can be arbitrarily chosen on the array. A wave generator was also integrated on chip to perform impedance spectroscopy within a wide frequency range from 1Hz to 1MHz. For a proof of concept, we show the magnitude and phase plots of platinum electrode-electrolyte interface impedances for different electrode sizes at different frequency ranges.
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Publication status
published
External links
Book title
Proceedings of the 30th anniversary Eurosensors Conference – Eurosensors 2016
Journal / series
Volume
168
Pages / Article No.
510 - 513
Publisher
Elsevier
Event
30th Anniversary Eurosensors Conference (Eurosensors 2016)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
CMOS; Microelectrode array (MEA); Electrical impedance spectroscopy (EIS); Electrophysiology; Lock-in amplifiers
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas