32-Channel Integrated Electrical Impedance Sensors on a Multi-Functional Neural Microelectrode Array Platform


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Date

2016

Publication Type

Conference Paper

ETH Bibliography

yes

Citations

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Data

Abstract

An integrated measurement platform was implemented to make in-vitro impedance measurements of neuronal cells on a multi-functional CMOS microelectrode array (MEA). This high-density array is made of 59’760 platinum microelectrodes with a pitch of 13.5μm. Impedance sensing can be performed through 32 electrodes in parallel, while the electrode sites can be arbitrarily chosen on the array. A wave generator was also integrated on chip to perform impedance spectroscopy within a wide frequency range from 1Hz to 1MHz. For a proof of concept, we show the magnitude and phase plots of platinum electrode-electrolyte interface impedances for different electrode sizes at different frequency ranges.

Publication status

published

Book title

Proceedings of the 30th anniversary Eurosensors Conference – Eurosensors 2016

Volume

168

Pages / Article No.

510 - 513

Publisher

Elsevier

Event

30th Anniversary Eurosensors Conference (Eurosensors 2016)

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

CMOS; Microelectrode array (MEA); Electrical impedance spectroscopy (EIS); Electrophysiology; Lock-in amplifiers

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas check_circle

Notes

Funding

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