Ge/SiGe Superlattices for Thermoelectric Devices Grown by Low-Energy Plasma-Enhanced Chemical Vapor Deposition
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Author / Producer
Date
2013-07
Publication Type
Journal Article
ETH Bibliography
yes
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Publication status
published
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Journal / series
Volume
42 (7)
Pages / Article No.
2030 - 2034
Publisher
Springer
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Edition / version
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Software
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Subject
Silicon germanium; Multiple quantum well; Thermoelectrics