High-resolution laser lithography system based on two-dimensional acousto-optic deflection
METADATA ONLY
Author / Producer
Date
2009
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
80 (8)
Pages / Article No.
85105
Publisher
American Institute of Physics
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
acousto-optical effects; beam steering; micromechanical resonators; photolithography; photonic crystals; photoresists; semiconductor lasers
Organisational unit
03255 - Günter, Peter (emeritus)
Notes
Received 30 April 2009, Accepted 19 July 2009, Published 19 August 2009.