Fabrication of Fresnel zone plates by holography in the extreme ultraviolet region


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Date

2008

Publication Type

Conference Paper

ETH Bibliography

yes

Citations

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Data

Rights / License

Permanent link

Publication status

published

Editor

Book title

Volume

26 (6)

Pages / Article No.

2160 - 2163

Publisher

American Institute of Physics

Event

The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008)

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Organisational unit

03562 - Van der Veen, Johannes (emeritus) check_circle

Notes

Received 18 June 2008, Accepted 25 August 2008, Published 1 December 2008.

Funding

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