Three-dimensional Monte Carlo modeling of critical dimension SEM metrology in a TCAD simulation environment
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Author / Producer
Date
2014
Publication Type
Other Conference Item
ETH Bibliography
yes
Citations
Altmetric
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Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
9236-39
Pages / Article No.
Publisher
SPIE
Event
SPIE Scanning Microscopies 2014
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
Notes
Conference lecture on 18 September 2014.