Monte Carlo modeling in the low-energy domain of the secondary electron emission of polymethylmethacrylate for critical-dimension scanning electron microscopy
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Author / Producer
Date
2010-06
Publication Type
Journal Article
ETH Bibliography
yes
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Publication status
published
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Journal / series
Volume
9 (2)
Pages / Article No.
23001
Publisher
SPIE
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Edition / version
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Date collected
Date created
Subject
Dielectric materials; PMMA; Secondary electrons; Monte Carlo simulation
Organisational unit
03228 - Fichtner, Wolfgang (emeritus)
Notes
Received 23 March 2009, Revised 3 February 2010, Accepted 12 February 2010, Published online 2 April 2010.