SiC Device Manufacturing: How Processing Impacts the Material and Device Properties
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Author / Producer
Date
2015
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
Editor
Book title
Journal / series
Volume
821-823
Pages / Article No.
381 - 386
Publisher
Trans Tech Publications
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
09480 - Grossner, Ulrike / Grossner, Ulrike
Notes
Published online 30 June 2015.