Sub-10 nm patterning using EUV interference lithography
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Author / Producer
Date
2011-09
Publication Type
Journal Article
ETH Bibliography
yes
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Publication status
published
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Journal / series
Volume
22 (37)
Pages / Article No.
375302
Publisher
IOP Publishing
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Edition / version
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Date created
Subject
Organisational unit
03661 - Löffler, Jörg F. / Löffler, Jörg F.
Notes
Received 22 May 2011, In final form 9 July 2011, Published online 19 August 2011.