Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance
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Author / Producer
Date
2021
Publication Type
Conference Paper
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yes
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Abstract
We demonstrate low-loss fiber-to-chip coupling via a-Si grating couplers on top of SiN waveguides for C-band TE light. The suggested simple scheme is fabrication tolerant and offers a path towards coupling efficiencies above -1 dB.
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published
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Book title
Integrated Photonics Research, Silicon and Nanophotonics : part of Advanced Photonics Congress
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Pages / Article No.
Publisher
OSA Publishing
Event
OSA Advanced Photonics Congress 2021
Edition / version
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Geographic location
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Subject
Organisational unit
03974 - Leuthold, Juerg / Leuthold, Juerg
02635 - Institut für Elektromagnetische Felder / Institute of Electromagnetic Fields
Notes
Session Novel Fabrication Processes and Solutions II (IM4A)
Funding
871658 - Neuro-augmented 112Gbaud CMOS plasmonic transceiver platform for Intra- and Inter-DCI (EC)
871391 - Energy- and Size-efficient Ultra-fast Plasmonic Circuits for Neuromorphic Computing Architectures (EC)
871391 - Energy- and Size-efficient Ultra-fast Plasmonic Circuits for Neuromorphic Computing Architectures (EC)