Al+ ion implanted on-axis <0001>semi-insulating 4H-SiC
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Author / Producer
Date
2015
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
Editor
Book title
Silicon Carbide and Related Materials 2014
Journal / series
Volume
821-823
Pages / Article No.
399 - 402
Publisher
Trans Tech Publications
Event
European Conference on Silicon Carbide & Related Materials (ECSCRM 2014)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
09480 - Grossner, Ulrike / Grossner, Ulrike