Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
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Author / Producer
Date
2009
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Rights / License
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Publication status
published
External links
Editor
Book title
Journal / series
Volume
6 (S1)
Pages / Article No.
Publisher
Wiley
Event
PSE Conference 2008
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
hexamethyldisiloxane (HMDSO); particles; plasma enhanced chemical vapor deposition (PECVD); powder compressibility; powder flowability
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
Notes
Received 14 September 2008, Accepted 22 February 2009.