Next generation secondary electron detector with energy analysis capability for SEM
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Date
2020-09
Publication Type
Journal Article
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Abstract
We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X‐ray (EDX) spectroscopy. We also demonstrate energy‐filtered secondary electron imaging of a copper‐on‐silicon sample using an electron pass energy of 12 eV.
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Publication status
published
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Book title
Journal / series
Volume
279 (3)
Pages / Article No.
207 - 211
Publisher
Wiley-Blackwell
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Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Auger electron spectroscopy; Bessel Box; Electron detector; Electron microscopy; Energy analyser; Energy filtered images; Scanning electron microscope
Organisational unit
03351 - Pescia, Danilo (emeritus) / Pescia, Danilo (emeritus)