Grundlagen zur Herstellung komplementärer Dünnfilmtransistoren auf polykristallinem Silizium
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Author / Producer
Date
1987
Publication Type
Doctoral Thesis
ETH Bibliography
yes
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Publication status
published
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Editor
Contributors
Examiner : Ilegems, Marc
Examiner : Melchior, Hans
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Journal / series
Volume
Pages / Article No.
Publisher
ETH Zürich
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Edition / version
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Date collected
Date created
Subject
DÜNNSCHICHTTRANSISTOREN + DÜNNFILMTRANSISTOREN, TFT (ELEKTRONIK); SILICIUM UND ANORGANISCHE SILICIUMVERBINDUNGEN (TECHNISCHE CHEMIE); THIN FILM TRANSISTORS, TFT (ELECTRONICS); SILICON AND INORGANIC SILICON COMPOUNDS (TECHNICAL CHEMISTRY)
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Notes
Diss. Naturwiss. ETH Zürich, Nr. 8145, 0000. Ref.: Melchior, H. ; Korref.: Ilegems, M..