Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis
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Date
2018-12-07
Publication Type
Journal Article
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yes
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Abstract
Design, fabrication and characterization of thin film piezoelectric devices for bulk acoustic wave acoustophoresis of micrometer-sized particles.
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published
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Volume
18 (23)
Pages / Article No.
3655 - 3667
Publisher
Royal Society of Chemistry
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03307 - Dual, Jürg (emeritus) / Dual, Jürg (emeritus)