Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm
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Author / Producer
Date
2002-06
Publication Type
Journal Article
ETH Bibliography
yes
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Rights / License
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Publication status
published
External links
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Book title
Journal / series
Volume
57 (6)
Pages / Article No.
1057 - 1070
Publisher
Elsevier
Event
Edition / version
Methods
Software
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Date collected
Date created
Subject
Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2
Organisational unit
03512 - Günther, Detlef / Günther, Detlef
Notes
Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.