Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm


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Date

2002-06

Publication Type

Journal Article

ETH Bibliography

yes

Citations

Altmetric
METADATA ONLY

Data

Rights / License

Publication status

published

Editor

Book title

Volume

57 (6)

Pages / Article No.

1057 - 1070

Publisher

Elsevier

Event

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2

Organisational unit

03512 - Günther, Detlef / Günther, Detlef check_circle

Notes

Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.

Funding

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