Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals
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Author / Producer
Date
2007
Publication Type
Journal Article
ETH Bibliography
yes
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Publication status
published
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Book title
Volume
25 (6)
Pages / Article No.
2175 - 2179
Publisher
American Institute of Physics
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Edition / version
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Subject
Organisational unit
03386 - Jäckel, Heinz (emeritus)
Notes
Titelvariante: JVST B. Received 10 June 2007. Accepted 8 October 2007. Published 7 December 2007..