Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films
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Author / Producer
Date
2006
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
OPEN ACCESS
Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
8 (6)
Pages / Article No.
823 - 839
Publisher
Springer
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
CMOS; deposition; gas sensor systems; metal oxides; microhotplates
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Received 22 April 2005, Accepted 21 August 2005, Published online 11 October 2005. It was possible to publish this article open access thanks to a Swiss National Licence with the publisher