Dislocation density and structure in Si1-xGex buffer layers deposited by LEPECVD
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Author / Producer
Date
2003
Publication Type
Conference Paper
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yes
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Publication status
published
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Book title
Microscopy of Semiconducting Materials 2003
Journal / series
Volume
180
Pages / Article No.
247 - 250
Publisher
IOP Publishing
Event
Conference on Microscopy of Semiconducting Materials 2003
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Is part of: 10.1201/9781351074636