Effect of thermal annealing on the stiffness of an SU-8 torsional spring
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Author / Producer
Date
2012
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Data
Abstract
The effect of thermal annealing on the torsional and bending stiffness of a polymeric torsional spring is studied, by analyzing the static and dynamic behavior of an SU-8 spring attached to the bottom of a silicon comb-drive actuator. The results suggest that, after thermal annealing, the torsional stiffness has been reduced (16.7%) while the bending stiffness has been increased, which is desirable for the operation of the spring. The phenomenon is explained by the influence of the bi-axial residual stress variation in the SU-8 spring.
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Publication status
published
External links
Book title
26th European Conference on Solid-State Transducers, EUROSENSOR 2012
Journal / series
Volume
47
Pages / Article No.
1199 - 1202
Publisher
Elsevier
Event
26th European Conference on Solid-State Transducers (EUROSENSOR 2012)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Comb-drive actuators; SU-8; Large deflection; Micromirror
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
03472 - Professur für Feldtheorie (ehemalig)