Analysis and design of multiresolution scan trajectories for high-speed scanning probe microscopy
METADATA ONLY
Loading...
Author / Producer
Date
2013
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Abstract
Recently, a new family of multi-resolution scan trajectories for high-speed scanning probe microscopy has been introduced based on Lissajous patterns. In this mode of imaging, the cantilever tip traverses the sample by following a pattern which is created by two single-tone harmonic waveforms interfering in a two dimensional plane. This paper provides a rigorous analysis of some of the fundamental properties of Lissajous scan trajectories, such as the imaging time and spatial resolution, and presents a step-by-step procedure which allows for the design of such trajectories. We also explore the multiresolution character of Lissajous scan trajectories which enables for a real-time preview of the sample in fractions of the overall imaging time. Experimental results are presented to substantiate the analytical results.
Permanent link
Publication status
published
Editor
Book title
6th IFAC Symposium on Mechatronic Systems
Journal / series
Volume
46 (5)
Pages / Article No.
138 - 144
Publisher
Elsevier
Event
6th IFAC Symposium on Mechatronic Systems (IFAC MECH 2013)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03751 - Lygeros, John / Lygeros, John