Monolithic metal-oxide microsensor system in industrial CMOS technology
METADATA ONLY
Loading...
Author / Producer
Date
2003
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Abstract
A novel monolithic gas sensing system is presented, which includes a microhotplate and advanced analog and digital circuitry for sensor control, signal readout and communication. An innovative design of a circular-shape microhotplate has been implemented and was optimized for use with a thick film of nanocrystalline tin dioxide as sensitive layer. Post-CMOS processing steps for an electrode metalization on wafer level were developed. The integrated circuitry consists of a programmable digital temperature controller, a logarithmic converter for the sensor signal, an on-chip temperature sensor, and a standard serial interface. The detection of less than 1ppm CO has been achieved with this system in gas test measurements.
Permanent link
Publication status
published
External links
Editor
Book title
Proceedings of the Sixteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS-03)
Journal / series
Volume
Pages / Article No.
303 - 306
Publisher
IEEE
Event
16th IEEE Annual International Conference on Micro Electro Mechanical Systems (MEMS 2003)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas