Characteristics of a Minimum-debris Optimum Conversion Efficiency Tin-Based LPP Source
METADATA ONLY
Author / Producer
Date
2008
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Book title
Emerging Lithographic Technologies XII
Journal / series
Volume
6921
Pages / Article No.
Publisher
SPIE
Event
Emerging Lithographic Technologies XII
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
EUV source; lithography; laser plasma; computational; hydrodynamics; atomic physicse-flash
Organisational unit
03548 - Abhari, Reza S. / Abhari, Reza S.