On-Chip Platform for Slack-Free Carbon Nanotube Resonators
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Date
2017-08-08
Publication Type
Conference Paper
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yes
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Abstract
This work describes an on-chip integrated micro-actuator device for slack-free carbon nanotube (CNT) resonators, improving frequency tunability and Q factor and to study non-linear mode interaction. The device fabricated on SOI wafer with low thermal budget (<600 K) encompasses a restricted symmetrical out-of-plane vibration and a stiff in-plane electro-thermal actuator with a displacement of ~112 nm at 2.7 mW. This corresponds to 5.6% of strain for a 2 μm long suspended carbon nanotube. The in-plane mechanical resonance designed to be far from CNT resonances in MHz regime is measured at 209 kHz. The design is optimized for low power consumption, electrical and thermal isolation and is customized for dry transfer of CNTs.
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Publication status
published
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Book title
Journal / series
Volume
1 (4)
Pages / Article No.
374
Publisher
MDPI
Event
Eurosensors 2017
Edition / version
Methods
Software
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Date collected
Date created
Subject
carbon nanotube; resonator; micro-actuator; strain-sensor
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer