Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography
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Author / Producer
Date
2012-08
Publication Type
Journal Article
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yes
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published
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Volume
101 (9)
Pages / Article No.
93104
Publisher
American Institute of Physics
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Organisational unit
03661 - Löffler, Jörg F. / Löffler, Jörg F.
Notes
Received 5 July 2012, Accepted 14 August 2012, Published online 27 August 2012.