Visualization of mold filling stages in thermal nanoimprint by using pressure gradients
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Author / Producer
Date
2007
Publication Type
Other Conference Item
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Volume
25 (6)
Pages / Article No.
2312 - 2316
Publisher
American Institute of Physics
Event
51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication