Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C
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Author / Producer
Date
2004-07
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
39 (7)
Pages / Article No.
1202 - 1207
Publisher
IEEE
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
CMOS monolithic metal-oxide gas sensors; Material characterization; Microcalorimeters; Microhotplate; Temperature control
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas