Processing-induced Defects in 4H-SiC: Depth-Resolved Characterization Using Low-Energy Muon Spin Spectroscopy


EMBARGOED UNTIL 2029-03-03
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Date

2025

Publication Type

Doctoral Thesis

ETH Bibliography

yes

Citations

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EMBARGOED UNTIL 2029-03-03

Data

Rights / License

Publication status

published

Editor

Contributors

Examiner : Prokscha, Thomas
Examiner : Månsson, Martin

Book title

Journal / series

Volume

Pages / Article No.

Publisher

ETH Zurich

Event

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Silicon Carbide (SiC); Muon-spin relaxation/rotation (μ+SR); Low-energy muons; Defect characterization; Muonium

Organisational unit

09480 - Grossner, Ulrike / Grossner, Ulrike

Notes

Funding

192218 - Understanding processing-induced defects to improve semiconductor device manufacturing technology (SNF)

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