AlN/Si3N4 multilayers as an interface model system for Al-1 (-) xSixN/Si3N4 nanocomposite thin films
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Author / Producer
Date
2015-01-15
Publication Type
Journal Article
ETH Bibliography
yes
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Altmetric
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Publication status
published
Editor
Book title
Journal / series
Volume
261
Pages / Article No.
418 - 425
Publisher
Elsevier
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Transparent Al-Si-N coatings; Epitaxial AIN/Al2O3; TEM