Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates


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Date

2014-01

Publication Type

Journal Article

ETH Bibliography

yes

Citations

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Data

Rights / License

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Publication status

published

Editor

Book title

Volume

22 (2)

Pages / Article No.

1402 - 1412

Publisher

OSA Publishing

Event

Edition / version

Methods

Software

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Date collected

Date created

Subject

Extreme-ultraviolet holography; Spatial-resolution; Lithography; Laser

Organisational unit

Notes

Received 25 November 2013, Revised 6 January 2014, Accepted 6 January 2014, Published 14 January 2014.

Funding

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