Low-Temperature Wet Conformal Nickel Silicide Deposition for Transistor Technology through an Organometallic Approach
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Author / Producer
Date
2017-02
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
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Publication status
published
External links
Editor
Book title
Journal / series
Volume
9 (5)
Pages / Article No.
4948 - 4955
Publisher
American Chemical Society
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Nanoparticle; Nickel silicide; One-pot synthesis; Organometallic approach; Semiconductor; Surface investigation
Organisational unit
03430 - Zenobi, Renato / Zenobi, Renato
03872 - Copéret, Christophe / Copéret, Christophe