Analysis of the propagation losses of InP/InGaAsP trench waveguides fabricated by focused ion beam
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Author / Producer
Date
2010
Publication Type
Journal Article
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yes
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published
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Journal / series
Volume
87 (11)
Pages / Article No.
2061 - 2064
Publisher
Elsevier
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Date created
Subject
Focused ion beam; Microstructuring; Sputtering; Gas-assisted etching; InP; Multimode trench waveguides; Propagation losses
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Notes
Received 7 September 2009, Revised 30 November 2009, Accepted 21 December 2009, Available online 6 January 2010.