MEMS actuators and sensors , and
Observations on their performance and selection for purpose
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Author / Producer
Date
2005-07
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
15 (7)
Pages / Article No.
Publisher
IOP Publishing
Event
15th European Workshop on Micromechanics (MME 2004)