Encapsulation of electrical contacts for suspended single-walled carbon nanotubes by atomic layer deposition
Muoth, Matthias
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Author / Producer
Date
2010-12
Publication Type
Conference Paper
ETH Bibliography
yes
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Publication status
published
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Book title
Journal / series
Volume
247 (11-12)
Pages / Article No.
2997 - 3001
Publisher
Wiley
Event
International Winterschool on Electronic Properties of Novel Materials 2010 (IWEPNM 2010)
Edition / version
Methods
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Date collected
Date created
Subject
atomic layer deposition; carbon nanotube; contact; encapsulation; passivation; suspended
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 29 April 2010, Revised 5 July 2010, Accepted 5 July 2010, Published online 10 September 2010.