Nano electro mechanical systems with single walled carbon nanotubes as functional elements
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Author / Producer
Date
2006
Publication Type
Conference Paper
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yes
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Abstract
Sensors are key components in mechatronic systems. Further system miniaturization will demand for continuous down-scaling of sensor functions in such systems most likely towards nano scale. Then new sensor device concepts will emerge to maintain performance, e.g. sensitivity, or to utilize unique functional properties of nano scale structures. This paper presents concepts to create nano electro mechanical sensors based on carbon nanotubes (CNTs). Suspended single walled CNT based cantilever and bridge structures and a membrane based CNT pressure sensor are introduced and discussed. Measurements on the pressure sensor prove metallic single walled CNTs as exceptional piezoresistive electro mechanical transducers with gauge factors above 200.
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Publication status
published
Editor
Book title
4th IFAC Symposium on Mechatronic Systems
Journal / series
Volume
39 (16)
Pages / Article No.
97 - 101
Publisher
Elsevier
Event
4th IFAC Symposium on Mechatronic Systems (MX 2006)
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Date created
Subject
Nano electro mechanical systems; NEMS; Carbon nanotubes; Sensors; Pressure sensor
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer