Improvements and experimental validation of a 3D-probi ng system for micro-components
OPEN ACCESS
Author / Producer
Date
2012
Publication Type
Report
ETH Bibliography
yes
Citations
Altmetric
OPEN ACCESS
Data
Rights / License
Abstract
The improvements and their experimental validation of a 3D-probing system for tactile dimensional metrology, introduced in 2010, are presented. The Fizeau interferometer is replaced by capacitive sensors, which enable a resolution at the probing sphere smaller than 100 nm. The results of a 2D-testing are also discussed. The simulated isotropic stiffness at the probing sphere is 84±25 N/m. The experimental stiffness is checked by force measurements and is determined to be 78±26 N/m. Requirements in design, manufacture, assembly and simulation to achieve this conformance between measured and simulated stiffness are presented.
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
Pages / Article No.
Publisher
Eidgenössische Technische Hochschule Zürich, Institute of Machine Tools and Manufacturing (IWF)
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
FEINMECHANIK (MASCHINENBAU); FORMMESSUNG + PROFILMESSUNG (MECHANIK); MICROMACHINE (MECHANICAL ENGINEERING); MEASUREMENT OF SHAPES AND PROFILES (MECHANICS); Sensor; MESSUNG VON DICKEN + DURCHMESSERN + HÖHEN + TIEFEN + NEIGUNGEN (MECHANIK); Metrology; PRECISION MECHANISMS AND INSTRUMENTS (MECHANICAL ENGINEERING); Development; MIKROMECHANIK (MASCHINENBAU); MEASUREMENT OF THICKNESS + DIAMETER + HEIGHT + DEPTH + INCLINATION (MECHANICS)
Organisational unit
03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)
02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing