UV absorbance of titanium oxide-like films by plasma assisted deposition from mixtures of oxygen and titanium-tetrakis-isopropoxide
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Author / Producer
Date
2005
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Papers based on presentations at the 17th International Symposium on Plasma Chemistry (ISPC 17)
Journal / series
Volume
78 (6)
Pages / Article No.
Publisher
International Union of Pure and Applied Chemistry
Event
XVII International Symposium on Plasma Chemistry (ISPC17)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Titanium oxide; Plasma assisted chemical vapour deposition (PACVD); UV absorption; XPS
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)