Switch-matrix-based Monolithic CMOS Platform Featuring a Large Array of Carbon Nanotube Sensor Elements and a 96-channel Readout Circuitry
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Author / Producer
Date
2016
Publication Type
Conference Paper
ETH Bibliography
yes
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Abstract
We present a monolithic CMOS biosensor system comprised of a switch-matrix-based array of carbon nanotube field-effect transistors (CNT-FETs) and an associated readout circuitry. The switch-matrix allows for flexible selection and simultaneous routing of 96 sensor elements to the readout channels. The resistances of the CNT-FETs were measured by applying a constant voltage and measuring the resulting current. Variation of the first-stage-amplifier gain and bandwidth allows for measuring resistances in the range between 50 kΩ and 20 MΩ at a bandwidth of up to 20 kHz. A parallel integration of the CNT-FETs has been achieved by using a floating electrode dielectrophoresis (DEP) manipulation technique.
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Publication status
published
External links
Book title
Proceedings of the 30th anniversary Eurosensors Conference – Eurosensors 2016
Journal / series
Volume
168
Pages / Article No.
916 - 919
Publisher
Elsevier
Event
30th Anniversary Eurosensors Conference (Eurosensors 2016)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
CNT-FETs; Dielectrophoresis; Switch matrix; CMOS readout
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas