Time-domain Coupled Full Maxwell- and Drift-diffusion-solver for Simulating Scanning Microwave Microscopy of Semiconductors


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Date

2019

Publication Type

Conference Paper

ETH Bibliography

yes

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Abstract

This paper presents a transient electromagnetic Maxwell solver (MS), a transient semiconductor Poisson-Drift-Diffusion (PDD) solver, and their numerical coupling. The proposed numerical solution schemes are based on Finite Element Method (FEM). Due to the solvers complexity it is important to carefully examine the obtained initial results. Therefore, a simple 1D pnjunction diode illuminated by an external electromagnetic plane wave is considered, as the stationary solutions of this structure such as the depletion width, built-in voltage, and carrier concentration distribution can be analytically obtained. The presented initially obtained transient results converge well to the analytic stationary solutions. The electromagnetic waves reflected from a diode with zero bias and 0.8V bias structure reveal a small signal difference within a wide frequency range, which is an encouraging initial step towards more realistic simulations of scanning microwave microscopy structures and arrangements. The extension of the presented field formulations and numerical methods to 2D and 3D problems is straightforward.

Publication status

published

Editor

Book title

2019 Photonics & Electromagnetics Research Symposium - Spring (PIERS-Spring)

Journal / series

Volume

Pages / Article No.

4071 - 4077

Publisher

IEEE

Event

2019 PhotonIcs and Electromagnetics Research Symposium - Spring (PIERS-Spring 2019)

Edition / version

Methods

Software

Geographic location

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Date created

Subject

Organisational unit

03974 - Leuthold, Juerg / Leuthold, Juerg check_circle
02635 - Institut für Elektromagnetische Felder / Institute of Electromagnetic Fields

Notes

Funding

761036 - Microwave Microscopy for Advanced and Efficient Materials Analysis and Production (EC)

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