Conformal Deposition of Conductive Single-Crystalline Cobalt Silicide Layer on Si Wafer via a Molecular Approach
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Author / Producer
Date
2018-03-27
Publication Type
Journal Article
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yes
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Publication status
published
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Journal / series
Volume
30 (6)
Pages / Article No.
2168 - 2173
Publisher
American Chemical Society
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Organisational unit
03430 - Zenobi, Renato / Zenobi, Renato
03872 - Copéret, Christophe / Copéret, Christophe