Surface plasmon illumination scheme for contact lithography beyond the diffraction limit
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Author / Producer
Date
2003-06
Publication Type
Other Conference Item
ETH Bibliography
yes
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Publication status
published
External links
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Book title
Journal / series
Volume
67-8
Pages / Article No.
24 - 30
Publisher
Elsevier
Event
28th International Conference on Micro- and Nano-Engineering
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Surface plasmons; Contact lithography; Contrast mechanism; Scattering calculation