An array of 2D Magnetic Micro Force Sensors for Life Science Applications
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Author / Producer
Date
2015
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Data
Abstract
This paper reports a 2D magnetic micro force sensor. The design consists of an array of SU-8 cantilevers incorporating electroplated ferromagnetic material and a Hall sensor array. The passive moving parts with magnetic readout enable robust and sensitive operation. The presented device has a detection limit of 30 μN and a range up to 1 mN. A not well-known material in MEMS community polyurethane was used as a protection layer encapsulating the whole device while interfering minimally with the operation. Cantilevers were characterized for their dynamic response by a laser Doppler vibrometer and 2D force calibration is performed using commercial force sensors. The presented sensor array can be used in life science applications and MEMS testing enabling parallel measurements in 2-D.
Permanent link
Publication status
published
External links
Book title
Eurosensors 2015
Journal / series
Volume
120
Pages / Article No.
220 - 224
Publisher
Elsevier
Event
29th European Conference on Solid-State Transducers (EUROSENSORS 2015)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Magnetic force sensor; Hall sensor; Microfabrication; Electroplating; Ferromagnetic
Organisational unit
03627 - Nelson, Bradley J. / Nelson, Bradley J.