Metadata only
Date
2015-06Type
- Other Journal Item
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierOrganisational unit
03967 - Rupp, Jennifer (SNF-Professur) (ehem.) / Rupp, Jennifer (SNF-Professur) (former)
Notes
Published online 18 May 2015.More
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ETH Bibliography
yes
Altmetrics