Metadata only
Author
Li, Yunjia J.
Hierold, Christofer
Date
2015Type
- Journal Article
Publication status
publishedJournal / series
Journal of microelectromechanical systemsVolume
Pages
Publisher
IEEESubject
Viscoelasticity; Creeping; SU-8; Comb-drive; Capacitive readout circuit; Proportional-integral-derivative controllerOrganisational unit
03609 - Hierold, Christofer
Notes
.More
Show all metadata