SU-8 as a Torsional Spring: Viscoelastic Creeping and Closed Loop Control
Metadata only
Date
2015Type
- Journal Article
Publication status
publishedJournal / series
Journal of microelectromechanical systemsVolume
Pages / Article No.
Publisher
IEEESubject
Viscoelasticity; Creeping; SU-8; Comb-drive; Capacitive readout circuit; Proportional-integral-derivative controllerOrganisational unit
03609 - Hierold, Christofer
Notes
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