SU-8 as a Torsional Spring: Viscoelastic Creeping and Closed Loop Control - Research Collection

Metadata only

Author

Li, Yunjia J.

Hierold, Christofer

Date

2015

Type

Journal Article

Citations

Cited 2 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1109/JMEMS.2014.2335051

Journal / series

Journal of microelectromechanical systems

Volume

24(3)

Pages / Article No.

608 - 617

Publisher

IEEE

Subject

Viscoelasticity; Creeping; SU-8; Comb-drive; Capacitive readout circuit; Proportional-integral-derivative controller

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer

Notes

.

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Show all metadata

Citations

Cited 2 times in Web of Science

ETH Bibliography

yes

Altmetrics