PECVD of SiO₂-like thin films under continuous wave and pulsed modes

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Author
Harf-Bapin, Elisabeth I.
Date
2001
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-004319846
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Rudolf von Rohr, Philipp
Publisher
ETH-Zürich
Subject
ANGEWANDTE PLASMAPHYSIK; EPITAXIALSCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); APPLIED PLASMA PHYSICS; EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); PROPERTIES OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS); THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION (PHYSICS OF MOLECULAR SYSTEMS)
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)  
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