Plasma surface modification in the afterglow of micro-barrier discharges

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Author
Reichen, Patrick
Date
2009
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-005990073
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Rudolf von Rohr, Philipp
Examiner: Kersten, Holger
Publisher
ETH
Subject
PULVERTECHNOLOGIE (VERFAHRENSTECHNIK); ANGEWANDTE PLASMAPHYSIK; KÖRNER + GRANULATE + PULVER (CHEMISCHE ERZEUGNISSE); APPLIED PLASMA PHYSICS; GRAINS + GRANULATES + POWDERS (CHEMICAL PRODUCTS); POWDER TECHNOLOGY (PROCESS ENGINEERING); CHEMICAL VAPOUR DEPOSITION, CVD (PRODUCTION ENGINEERING); BENETZEN (VERFAHRENSTECHNIK); WETTING (PROCESS ENGINEERING); CHEMISCHE BESCHICHTUNGEN AUS DER GASPHASE, CVD (PRODUKTIONSTECHNIK)
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)  
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